Browsing by author "Wang, C.G"

Now showing items 1-1 of 1

Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O

Fedorenko, Yanina; Swerts, Johan; Maes, Jan; Tois, E.; Haukka, S.; Wang, C.G; Wilk, G.; Delabie, Annelies; Deweerd, Wim; De Gendt, Stefan (2007)