Publication:
Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2016 since deposited on 2021-10-16
Acq. date: 2025-10-25
Citations
Metrics
Views
2016 since deposited on 2021-10-16
Acq. date: 2025-10-25
Citations