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Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O
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Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O
Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Fedorenko, Yanina
;
Swerts, Johan
;
Maes, Jan
;
Tois, E.
;
Haukka, S.
;
Wang, C.G
;
Wilk, G.
;
Delabie, Annelies
;
Deweerd, Wim
;
De Gendt, Stefan
Journal
Electrochemical and Solid-State Letters
Abstract
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2015
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
2015
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations