Publication:
Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O
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2031 since deposited on 2021-10-16
4last month
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Acq. date: 2026-07-28
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Statistics
Views
2031 since deposited on 2021-10-16
4last month
2last week
Acq. date: 2026-07-28
Citations