Browsing by author "Jiang, Jiong"
Now showing items 1-3 of 3
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Accurate models for EUV Lithography
Hendrickx, Eric; Lorusso, Gian; Van Setten, Eelco; Hansen, Steve; Jiang, Jiong; Liu, Wei; Chen, Luogi (2009) -
Accurate models for EUV lithography
Hendrickx, Eric; Lorusso, Gian; Jiang, Jiong; Chen, Luoqi; Lui, Wei; Van Setten, Eelca; Hansen, Steve (2009) -
Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPC
Nikolsky, Peter; Davydova, Natalia; van Ingen Schenau, Koen; Van Adrichem, Paul; Hendrickx, Eric; Lorusso, Gian; Jiang, Jiong; Liu, Wei; Liu, Huayu (2009-09)