Browsing by author "Kolics, Artur"
Now showing items 1-3 of 3
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Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies
van der Veen, Marleen; Vandersmissen, Kevin; Dictus, Dries; Demuynck, Steven; Liu, Ran; Bin, Xiaomin; Nalla, Praveen; Lesniewska, Alicja; Hall, Laurie; Croes, Kristof; Zhao, Larry; Boemmels, Juergen; Kolics, Artur; Tokei, Zsolt (2015) -
Electromigration and thermal storage study of barrierless Co vias
Varela Pedreira, Olalla; Croes, Kristof; Zahedmanesh, Houman; Vandersmissen, Kevin; van der Veen, Marleen; Vega Gonzalez, Victor; Dictus, Dries; Zhao, Larry; Kolics, Artur; Tokei, Zsolt (2018) -
Enabling sub 20nm Cu metallization with PEALD Ru-TiN barrier and ELD seed
Siew, Yong Kong; Swerts, Johan; Dictus, Dries; El-Mekki, Zaid; Armini, Silvia; Dordi, Yezdi; Yoon, Alex; Kolics, Artur; Barbarin, Yohan; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt (2012)