Browsing by author "Ngai, Chris"
Now showing items 1-1 of 1
-
Towards manufacturing a 10nm node device with complementary EUV lithography
Hermans, Jan; Dai, Huixiong; Niroomand, Ardavan; Laidler, David; Mao, Ming; Chen, Yongmei; Leray, Philippe; Ngai, Chris; Cheng, Shaunee (2013)