Browsing by author "Viatkina, Katja"

Now showing items 1-2 of 2

Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography

Lorusso, Gian; Mao, Ming; Reijnen, Liesbeth; Viatkina, Katja; Knops, Roel; Fliervoet, Timon (2015)
Integrated approach to improving local CD uniformity in EUV patterning

Liang, Andrew; Hermans, Jan; Tran, Tim; Viatkina, Katja; Liang, Chen-Wei; Ward, Brandon; Chuang, Steven; Yu, Jengyi; Harm, Greg; Vandereyken, Jelle; Rio, David; Kubis, Michael; Tan, Samantha; Wise, Rich; Dusa, Mircea; Reddy, Sirish; Singhal, Akhil; Van Schravendijk, Bart; Dixit, Girish; Shamma, Nader (2017)