Browsing by author "Meynaerts, Ben"

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From surface dependence in atomic layer deposition to area-selective deposition of TiN

Delabie, Annelies; Carbajal, Diego; Soethoudt, Job; Chan, BT; Altamirano Sanchez, Efrain; Meynaerts, Ben; Clerix, Jan-Willem; Van Elshocht, Sven (2019)
Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide

Soethoudt, Job; Tomczak, Yoann; Meynaerts, Ben; Chan, BT; Delabie, Annelies (2020)