Authors

Soethoudt, Job; Tomczak, Yoann; Meynaerts, Ben; Chan, BT; Delabie, Annelies

ISSN

1932-7447

Issue

13

Journal

Journal of Physical Chemistry C

Volume

124

Title

Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide

Publication type

Journal article