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Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide

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1930 since deposited on 2021-10-29
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Acq. date: 2026-02-24

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1930 since deposited on 2021-10-29
2last month
1last week
Acq. date: 2026-02-24

Citations