Publication:
Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide
Date
| dc.contributor.author | Soethoudt, Job | |
| dc.contributor.author | Tomczak, Yoann | |
| dc.contributor.author | Meynaerts, Ben | |
| dc.contributor.author | Chan, BT | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Soethoudt, Job | |
| dc.contributor.imecauthor | Tomczak, Yoann | |
| dc.contributor.imecauthor | Chan, BT | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
| dc.date.accessioned | 2021-10-29T04:31:37Z | |
| dc.date.available | 2021-10-29T04:31:37Z | |
| dc.date.issued | 2020 | |
| dc.identifier.issn | 1932-7447 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35986 | |
| dc.identifier.url | https://doi.org/10.1021/acs.jpcc.9b11270 | |
| dc.source.beginpage | 7163 | |
| dc.source.endpage | 7173 | |
| dc.source.issue | 13 | |
| dc.source.journal | Journal of Physical Chemistry C | |
| dc.source.volume | 124 | |
| dc.title | Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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