Browsing by author "Hub, W."
Now showing items 1-5 of 5
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Alkaline cleaning of silicon wafers: additives for the prevention of metal contamination
Martin Hoyas, Ana; Baeyens, Martien; Hub, W.; Mertens, Paul; Kolbesen, B. O. (1999) -
Effect of metal contamination and improved cleaning strategies
Mertens, Paul; Bearda, Twan; Loewenstein, Lee; Martin, A.R.; Hub, W.; Kolbesen, B. O.; Teerlinck, Ivo; Vos, Rita; Baeyens, Martien; De Gendt, Stefan; Kenis, Karine; Heyns, Marc (1999) -
Quantitative modeling of H2O2 decomposition in SC1
Mertens, Paul; Baeyens, Martien; Moyaerts, Gert; Okorn-Schmidt, H. F.; Vos, Rita; De Waele, Rita; Hatcher, Z.; Hub, W.; De Gendt, Stefan; Knotter, Martin; Meuris, Marc; Heyns, Marc (1998) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1998) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1999)