Authors

Mertens, Paul; Baeyens, Martien; Moyaerts, Gert; Okorn-Schmidt, H. F.; Vos, Rita; De Waele, Rita; Hatcher, Z.; Hub, W.; De Gendt, Stefan; Knotter, Martin; Meuris, Marc; Heyns, Marc

Conference

Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

Quantitative modeling of H2O2 decomposition in SC1

Publication type

Proceedings paper

Embargo date

9999-12-31