Publication:

Quantitative modeling of H2O2 decomposition in SC1

Date

1998
Proceedings Paper
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dc.contributor.authorMertens, Paul
dc.contributor.authorBaeyens, Martien
dc.contributor.authorMoyaerts, Gert
dc.contributor.authorOkorn-Schmidt, H. F.
dc.contributor.authorVos, Rita
dc.contributor.authorDe Waele, Rita
dc.contributor.authorHatcher, Z.
dc.contributor.authorHub, W.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKnotter, Martin
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-01T08:30:11Z
dc.date.available2021-10-01T08:30:11Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2762
dc.source.beginpage176
dc.source.conferenceProceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
dc.source.conferencedate31/08/1997
dc.source.conferencelocationParis France
dc.source.endpage183
dc.title

Quantitative modeling of H2O2 decomposition in SC1

dc.typeProceedings paper
dspace.entity.typePublication
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