Browsing by imec author "65f737ccc2874341babd8f540cd6d4203c267024"
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Molybdenum as an Alternative Metal: Thin Film Properties
Founta, Valeria; Witters, Thomas; Mertens, Sofie; Vanstreels, Kris; Meersschaut, Johan; Van Marcke, Patricia; Korytov, Maxim; Franquet, Alexis; Wilson, Chris; Tokei, Zsolt; Van Elshocht, Sven; Adelmann, Christoph (2019) -
Properties of ultrathin molybdenum films for interconnect applications
Founta, Valeria; Soulie, Jean-Philippe; Sankaran, Kiroubanand; Vanstreels, Kris; Opsomer, Karl; Morin, Pierre; Lagrain, Pieter; Franquet, Alexis; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Detavernier, Christophe; Van de Vondel, Joris; De Wolf, Ingrid; Pourtois, Geoffrey; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph (2022) -
Ru Stress Assessment by Membrane Wrinkling for Interconnect Applications
Founta, Valeria; Soulie, Jean-Philippe; De Wolf, Ingrid; de Vondel, Joris Van; Swerts, Johan; Tokei, Zsolt; Adelmann, Christoph (2023)