Molybdenum as an Alternative Metal: Thin Film Properties

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Authors
Founta, Valeria; Witters, Thomas; Mertens, Sofie; Vanstreels, Kris; Meersschaut, Johan; Van Marcke, Patricia; Korytov, Maxim; Franquet, Alexis; Wilson, Chris; Tokei, Zsolt; Van Elshocht, Sven; Adelmann, Christoph
Conference
IEEE International Interconnect Technology Conference (IITC 2019)
Title
Molybdenum as an Alternative Metal: Thin Film Properties
Publication type
Proceedings paper
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