Publication:

Molybdenum as an Alternative Metal: Thin Film Properties

Date

2019
Proceedings Paper
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dc.contributor.authorFounta, Valeria
dc.contributor.authorWitters, Thomas
dc.contributor.authorMertens, Sofie
dc.contributor.authorVanstreels, Kris
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorKorytov, Maxim
dc.contributor.authorFranquet, Alexis
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorFounta, Valeria
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-27T09:17:13Z
dc.date.available2021-10-27T09:17:13Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32974
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.title

Molybdenum as an Alternative Metal: Thin Film Properties

dc.typeProceedings paper
dspace.entity.typePublication
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