Browsing by author "Adams, Jacob"
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EUV resist requirements: absorbance and acid yield
Gronheid, Roel; Fonseca, Carlos; Leeson, Michael; Adams, Jacob; Strahan, Jeff; Willson, C. Grant; Smith, Bruce W. (2009) -
Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists
Straham, Jeffrey; Adams, Jacob; Jen, Wei-Lun; Vanleenhove, Anja; Neikirk, Colin; Rochelle, Timothy; Gronheid, Roel; Willson, Grant (2009)