EUV resist requirements: absorbance and acid yield

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Authors
Gronheid, Roel; Fonseca, Carlos; Leeson, Michael; Adams, Jacob; Strahan, Jeff; Willson, C. Grant; Smith, Bruce W.
Conference
Advances in Resist Materials and Processing Technology XXVI
Title
EUV resist requirements: absorbance and acid yield
Publication type
Proceedings paper
Embargo date
9999-12-31
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