Publication:

EUV resist requirements: absorbance and acid yield

Date

2009
Proceedings Paper
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dc.contributor.authorGronheid, Roel
dc.contributor.authorFonseca, Carlos
dc.contributor.authorLeeson, Michael
dc.contributor.authorAdams, Jacob
dc.contributor.authorStrahan, Jeff
dc.contributor.authorWillson, C. Grant
dc.contributor.authorSmith, Bruce W.
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-17T22:34:52Z
dc.date.available2021-10-17T22:34:52Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15401
dc.source.beginpage727332
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXVI
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan Jose, CA USA
dc.title

EUV resist requirements: absorbance and acid yield

dc.typeProceedings paper
dspace.entity.typePublication
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