Publication:

EUV resist requirements: absorbance and acid yield

Date

2009

Proceedings Paper

Simple item page Full metadata Statistics

Files

16950.pdf 260.37 KB

Author(s)

;

Fonseca, Carlos

;

Leeson, Michael

;

;

;

Willson, C. Grant

;

Smith, Bruce W.

Metrics

1893 since deposited on 2021-10-17

Acq. date: 2025-12-10