Browsing by author "Horsfall, Alton"
Now showing items 1-2 of 2
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A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
Wilson, Chris; Croes, Kristof; Van Cauwenberghe, Marc; Tokei, Zsolt; Beyer, Gerald; Horsfall, Alton; O'Neill, Anthony (2009) -
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features
Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Beyer, Gerald; Gallacher, Barry; Bull, Steve; Horsfall, Alton; O'Neill, Anthony (2010)