Authors

Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Beyer, Gerald; Gallacher, Barry; Bull, Steve; Horsfall, Alton; O'Neill, Anthony

ISSN

0040-6090

Issue

1

Journal

Thin Solid Films

Volume

519

Title

Analysis and characterization of a mechanical sensor to monitor stress in interconnect features

Publication type

Journal article