Analysis and characterization of a mechanical sensor to monitor stress in interconnect features

Publication:

2010

Journal article

Author(s)

;

;

;

;

Gallacher, Barry

;

Bull, Steve

;

Horsfall, Alton

;

O'Neill, Anthony

Thin Solid Films

1934 since deposited on 2021-10-19

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Acq. date: 2026-10-03