Publication:
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features
Date
| dc.contributor.author | Wilson, Chris | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Gallacher, Barry | |
| dc.contributor.author | Bull, Steve | |
| dc.contributor.author | Horsfall, Alton | |
| dc.contributor.author | O'Neill, Anthony | |
| dc.contributor.imecauthor | Wilson, Chris | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-19T00:28:56Z | |
| dc.date.available | 2021-10-19T00:28:56Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0040-6090 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18356 | |
| dc.source.beginpage | 443 | |
| dc.source.endpage | 449 | |
| dc.source.issue | 1 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 519 | |
| dc.title | Analysis and characterization of a mechanical sensor to monitor stress in interconnect features | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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