Browsing by author "Rudenko, K."

Now showing items 1-2 of 2

Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Rezvanov, Askar; Miakonkikh, A.; Vishnevskiy, A.; Gitshin, O.; Rudenko, K.; Baklanov, Mikhaïl (2016)
Investigation of plasma damage of low-k dielectrics during cryogenic etching

Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl (2015)