Browsing by author "Kim, Dongchan"
Now showing items 1-2 of 2
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Effect of helium plasma on low-k damage during dry resist strip
Urbanowicz, Adam; Shamiryan, Denis; Kim, Dongchan; Baklanov, Mikhaïl (2007) -
Effects of plasma chemistry on low-k film properties
Kim, Dongchan; Urbanowicz, Adam; Mannaert, Geert; Struyf, Herbert; Min, K. J.; Kang, C. J.; Moon, J. T.; Baklanov, Mikhaïl (2007)