Publication:

Effects of plasma chemistry on low-k film properties

Date

2007

Proceedings Paper

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Author(s)

;

Urbanowicz, Adam

;

Mannaert, Geert

;

Struyf, Herbert

;

;

;

;

Baklanov, Mikhaïl

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1888 since deposited on 2021-10-16

Acq. date: 2026-02-26