Publication:
Effects of plasma chemistry on low-k film properties
Date
| dc.contributor.author | Kim, Dongchan | |
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Mannaert, Geert | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.author | Min, K. J. | |
| dc.contributor.author | Kang, C. J. | |
| dc.contributor.author | Moon, J. T. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Mannaert, Geert | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.date.accessioned | 2021-10-16T17:06:30Z | |
| dc.date.available | 2021-10-16T17:06:30Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12398 | |
| dc.source.conference | 29th International Symposium on Dry Process - DPS | |
| dc.source.conferencedate | 13/11/2007 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.title | Effects of plasma chemistry on low-k film properties | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |