Browsing by author "Tong, William M."

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Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Grella, Luca; Carroll, Alan; Murray, Kirk; McCord, Mark A.; Tong, William M.; Brodie, Alan D.; Gubiotti, Thomas; Sun, Fuge; Kidwingira, Francoise; Kojima, Shinichi; Petric, Paul; Bevis, Christopher F.; Vereecke, Bart; Haspeslagh, Luc; Mane, Anil U.; Elam, Jeffrey W. (2013)