Authors

Grella, Luca; Carroll, Alan; Murray, Kirk; McCord, Mark A.; Tong, William M.; Brodie, Alan D.; Gubiotti, Thomas; Sun, Fuge; Kidwingira, Francoise; Kojima, Shinichi; Petric, Paul; Bevis, Christopher F.; Vereecke, Bart; Haspeslagh, Luc; Mane, Anil U.; Elam, Jeffrey W.

DOI

10.1117/1.JMM.12.3.031107

ISSN

1537-1646

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

12

Title

Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Publication type

Journal article