Publication:

Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Date

2013
Journal article
https://doi.org/10.1117/1.JMM.12.3.031107
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Author(s)

Grella, Luca
;
Carroll, Alan
;
Murray, Kirk
;
McCord, Mark A.
;
Tong, William M.
;
Brodie, Alan D.
;
Gubiotti, Thomas
;
Sun, Fuge
;
Kidwingira, Francoise
;
Kojima, Shinichi
;
Petric, Paul
;
Bevis, Christopher F.
;
Vereecke, Bart  
;
Haspeslagh, Luc  
;
Mane, Anil U.
;
Elam, Jeffrey W.

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

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1975 since deposited on 2021-10-21
Acq. date: 2026-02-25

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1975 since deposited on 2021-10-21
Acq. date: 2026-02-25

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