Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Grella, Luca; Carroll, Alan; Murray, Kirk; McCord, Mark A.; Tong, William M.; Brodie, Alan D.; Gubiotti, Thomas; Sun, Fuge; Kidwingira, Francoise; Kojima, Shinichi; Petric, Paul; Bevis, Christopher F.; Vereecke, Bart; Haspeslagh, Luc; Mane, Anil U.; Elam, Jeffrey W.

doi:10.1117/1.JMM.12.3.031107

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Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Date

2013

Journal article

https://doi.org/10.1117/1.JMM.12.3.031107

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Kidwingira, Francoise

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Kojima, Shinichi

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Petric, Paul

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Bevis, Christopher F.

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Journal of Micro/Nanolithography MEMS and MOEMS

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Acq. date: 2025-12-13

Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

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