Browsing by author "Khanh, N."

Now showing items 1-1 of 1

Plasma immersion ion implantation for shallow junctions in silicon

Pinter, Istvan; Abdulhadi, A.; Makaro, Z.; Khanh, N.; Adam, M.; Barsony, I.; Sivoththaman, Sivanarayanamoorthy; Poortmans, Jef; Song, H.; Adriaenssens, G. (1998)