Plasma immersion ion implantation for shallow junctions in silicon

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Authors
Pinter, Istvan; Abdulhadi, A.; Makaro, Z.; Khanh, N.; Adam, M.; Barsony, I.; Sivoththaman, Sivanarayanamoorthy; Poortmans, Jef; Song, H.; Adriaenssens, G.
Conference
E-MRS 1998 Spring Meeting; 16-19 June 1998; Strasbourg, France.
Title
Plasma immersion ion implantation for shallow junctions in silicon
Publication type
Oral presentation
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