Plasma immersion ion implantation for shallow junctions in silicon

Publication:

1998

Presentation

Author(s)

Pinter, Istvan

;

Abdulhadi, A.

;

Makaro, Z.

;

Khanh, N.

;

Adam, M.

;

Barsony, I.

;

Sivoththaman, Sivanarayanamoorthy

;

;

Song, H.

;

Adriaenssens, G.

1974 since deposited on 2021-10-01

Acq. date: 2026-05-01