Publication:
Plasma immersion ion implantation for shallow junctions in silicon
Date
| dc.contributor.author | Pinter, Istvan | |
| dc.contributor.author | Abdulhadi, A. | |
| dc.contributor.author | Makaro, Z. | |
| dc.contributor.author | Khanh, N. | |
| dc.contributor.author | Adam, M. | |
| dc.contributor.author | Barsony, I. | |
| dc.contributor.author | Sivoththaman, Sivanarayanamoorthy | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Song, H. | |
| dc.contributor.author | Adriaenssens, G. | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-01T08:41:31Z | |
| dc.date.available | 2021-10-01T08:41:31Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2867 | |
| dc.source.conference | E-MRS 1998 Spring Meeting; 16-19 June 1998; Strasbourg, France. | |
| dc.source.conferencelocation | ||
| dc.title | Plasma immersion ion implantation for shallow junctions in silicon | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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