Browsing by author "Sun, Junling"

Now showing items 1-1 of 1

Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)

Radisic, Dunja; Demand, Marc; Chan, Shihsheng; Demuynck, Steven; Kumar, Kaushik; Metz, Andrew; Teugels, Lieve; Sun, Junling; Smith, Jeffrey; Sebaai, Farid; Hopf, Toby; Altamirano Sanchez, Efrain (2019)