Publication:
Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
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2277 since deposited on 2021-10-27
8last month
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Acq. date: 2026-08-07
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Statistics
Views
2277 since deposited on 2021-10-27
8last month
2last week
Acq. date: 2026-08-07
Citations