Publication:
Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2224 since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations
Metrics
Views
2224 since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations