Publication:
Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
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2287 since deposited on 2021-10-27
9last month
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Acq. date: 2026-09-15
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Statistics
Views
2287 since deposited on 2021-10-27
9last month
5last week
Acq. date: 2026-09-15
Citations