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Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
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2229 since deposited on 2021-10-27
2last month
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Acq. date: 2025-12-11
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Views
2229 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2025-12-11
Citations