Browsing by author "Godny, Stephane"

Asymmetric relaxation of SiGe in patterned Si line structures

Wormington, Matthew; Lafford, Tamzin; Godny, Stephane; Ryan, Paul; Loo, Roger; Bhouri, Nada; Caymax, Matty (2007)

Gate-all-around MOSFETs based on vertically stacked horizontal Si nanowires in a replacement metal gate process on bulk Si substrates

Mertens, Hans; Ritzenthaler, Romain; Hikavyy, Andriy; Kim, Min-Soo; Tao, Zheng; Wostyn, Kurt; Chew, Soon Aik; De Keersgieter, An; Mannaert, Geert; Rosseel, Erik; Schram, Tom; Devriendt, Katia; Tsvetanova, Diana; Dekkers, Harold; Demuynck, Steven; Vaisman Chasin, Adrian; Van Besien, Els; Dangol, Anish; Godny, Stephane; Douhard, Bastien; Bosman, Niels; Richard, Olivier; Geypen, Jef; Bender, Hugo; Barla, Kathy; Mocuta, Dan; Horiguchi, Naoto; Thean, Aaron (2016)

Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control

Gunay Demirkol, Anil; Altamirano Sanchez, Efrain; Héraud, Stéphane; Godny, Stephane; Charley, Anne-Laure; Leray, Philippe; Urenski, Ronen; Cohen, Oded; Turovets, Igor; Wolfling, Shay (2016)

Stack and topography verification as an enabler for computational metrology target design

Adel, Michael E.; Tarshish-Shapir, Inna; Gready, David; Ghinovker, Mark; Dror, Chen; Godny, Stephane (2015)