Authors

Wormington, Matthew; Lafford, Tamzin; Godny, Stephane; Ryan, Paul; Loo, Roger; Bhouri, Nada; Caymax, Matty

Conference

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics at NIST

Title

Asymmetric relaxation of SiGe in patterned Si line structures

Publication type

Proceedings paper

Embargo date

9999-12-31