Browsing by author "Klenov, Dmitri"
Now showing items 1-3 of 3
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Nanobeam dffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devices
Favia, Paola; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Klenov, Dmitri; Bender, Hugo (2011) -
Reliability of strained-Si devices with post-oxide-deposition strain introduction
Shickova, Adelina; Verheyen, Peter; Eneman, Geert; Degraeve, Robin; Simoen, Eddy; Favia, Paola; Klenov, Dmitri; San Andres, Enrico; Kaczer, Ben; Jurczak, Gosia; Absil, Philippe; Maes, Herman; Groeseneken, Guido (2008) -
Strain study in transistors with SiC and SiGe source and drain by STEM nano beam diffraction
Favia, Paola; Klenov, Dmitri; Eneman, Geert; Verheyen, Peter; Bauer,; Weeks,; Thomas,; Bender, Hugo (2008-09)