Reliability of strained-Si devices with post-oxide-deposition strain introduction

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Authors

Shickova, Adelina; Verheyen, Peter; Eneman, Geert; Degraeve, Robin; Simoen, Eddy; Favia, Paola; Klenov, Dmitri; San Andres, Enrico; Kaczer, Ben; Jurczak, Gosia; Absil, Philippe; Maes, Herman; Groeseneken, Guido

ISSN

0018-9383

Issue

12

Journal

IEEE Transactions on Electron Devices

Volume

55

Title

Reliability of strained-Si devices with post-oxide-deposition strain introduction

Publication type

Journal article

Embargo date

9999-12-31

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