Authors

Favia, Paola; Klenov, Dmitri; Eneman, Geert; Verheyen, Peter; Bauer,; Weeks,; Thomas,; Bender, Hugo

Conference

EMC. 14th European Microscopy Congress. Volume 2: Materials Science

Title

Strain study in transistors with SiC and SiGe source and drain by STEM nano beam diffraction

Publication type

Proceedings paper