Publication:
Strain study in transistors with SiC and SiGe source and drain by STEM nano beam diffraction
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1870 since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1870 since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations