Browsing by author "Klopovskiy, Konstantin"

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Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures

Rakhimova, Tatyana; Braginsky, OLEG; Klopovskiy, Konstantin; Kovalev, Alexander; Lopaev, Dmitry; Proshina, Olga; Rakhimov, Alexander; Shamiryan, Denis; Vasilieva, Anna; Voloshin, Dmitry (2009)