Authors

Rakhimova, Tatyana; Braginsky, OLEG; Klopovskiy, Konstantin; Kovalev, Alexander; Lopaev, Dmitry; Proshina, Olga; Rakhimov, Alexander; Shamiryan, Denis; Vasilieva, Anna; Voloshin, Dmitry

ISSN

0093-3813

Issue

9

Journal

IEEE Transactions on Plasma Science

Volume

37

Title

Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures

Publication type

Journal article