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Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures
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1972 since deposited on 2021-10-18
3last month
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Acq. date: 2026-02-27
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Statistics
Views
1972 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-02-27
Citations