Publication:
Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1968 since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations
Metrics
Views
1968 since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations