Browsing by author "Shimizu, Yasua"
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Vapor phase doping for ultra shallow juntion formation in advanced Si CMOS devices
Shimizu, Yasua; Nguyen, Duy; Jiang, Sijia; Rosseel, Erik; Takeuchi, Shotaro; Everaert, Jean-Luc; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty (2010-01)