Vapor phase doping for ultra shallow juntion formation in advanced Si CMOS devices

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Authors
Shimizu, Yasua; Nguyen, Duy; Jiang, Sijia; Rosseel, Erik; Takeuchi, Shotaro; Everaert, Jean-Luc; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty
Conference
5th International Workshop on New Group IV Semiconductor Nanoelectronics
Title
Vapor phase doping for ultra shallow juntion formation in advanced Si CMOS devices
Publication type
Meeting abstract
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