Browsing by author "Meura, Kim-Anh Bui-Thi"
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Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX
Meura, Kim-Anh Bui-Thi; Torregrosa, Frank; Robbes, Anne-Sophie; Choi, Seoyoun; Merkulov, Alexandre; Moret, Mona; Duchaine, Julian; Horiguchi, Naoto; Li, Letian; Mitterbauer, Christoph (2014)