Browsing by author "Ogawa, Y."

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Optimization of post etch cobalt compatible clean by pH and oxidizer

Iino, H.; Ogawa, Y.; Masaoka, T.; Le, Quoc Toan; Kesters, Els; Rip, Jens; Oniki, Yusuke; Akanishi, Y.; Iwasaki, Akihisa; Holsteyns, Frank (2018)