Browsing by author "Blackwell, James M."
Now showing items 1-4 of 4
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Critical material properties for pattern collapse mitigation
Winroth, Gustaf; Younkin, Todd R.; Blackwell, James M.; Gronheid, Roel (2012) -
Critical material properties for pattern collapse mitigation
Winroth, Gustaf; Younkin, Todd; Blackwell, James M.; Gronheid, Roel (2012) -
Photobase generator enabled pitch division: a progress report
Gu, Xinyu; Cho, Younjin; Kawakami, Takanori; Hagiwara, Yuji; Rawlings, Brandon; Mesch, Ryan; Ogata, Toshiyuki; Kim, Taeho; Seshimo, Takehiro; Wang, Wade; Sundaresan, Arun K.; Turro, Nicholas J.; Gronheid, Roel; Blackwell, James M.; Bristol, Robert; Wilson, C. Grant (2011) -
Relationship between film thickness loss and polymer deprotection for extreme ultraviolet and ArF photoresists
Winroth, Gustaf; Younkin, Todd; Blackwell, James M.; Gronheid, Roel (2012)